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target substrate | MAX. W150×L150 (mm) |
MIN. W50×L50 (mm) | |
part height | Upper 10,15,20,25mm |
Lower 10,15,20,25mm | |
Workbench | 3 mm |
N2 gas supply source | Above 99.99% 0.4~0.7Mpa |
Above 150NL/min | |
Substrate conveying height (rolling line) | 900±20mm |
Dimensions | W1210×L2200※1×H1370※2 (mm) |
Total Weight | About 600kg |
Shipping speed | 0.1~0.7m/min |